集成声学装置

1. A method for fabricating an integrated acoustic device on an arbitrary functional substrate, comprising : epitaxially growing a sacrificial layer on a host substrate; epitaxially growing a piezoelectric transducer on the sacrificial layer; forming at least one top metal electrode on a top surface of the piezoelectric transducer; etching the sacrificial layer to release the piezoelectric transducer and removing the piezoelectric transducer from the host substrate while maintaining its epitaxial nature and materials properties; and transferring the released piezoelectric transducer to the arbitrary functional substrate; wherein the physical phenomena from the piezoelectric transducer and the arbitrary functional substrate interact to form a hybrid acoustic microsystem comprising the piezoelectric transducer and the arbitrary functional substrate; wherein the arbitrary functional substrate provides critical functionality to the acoustic microsystem.