专利类型发明专利 |
申请类型暂无 |
申请方名称Choi Byoungki , Oh Jungmin , Kim Daihyun , Ham Cheol , Hwang Kyuyoung , Park Mihyun , Lee Hyosan , Kang Byungjoon , Kim Hwang Suk |
发明人暂无 |
申请号EP23165831 |
公开号EP4257659A2 |
国际申请暂无 |
申请日2023-03-31 00:00:00 |
主分类号C09K13/00 |
代理机构Elkington And Fife Llp |
代理人Elkington And Fife Llp |
公开日2023-10-11 00:00:00 |
优先权KR1020220168160;KR1020230042150;KR1020220041912 |
进入国家日暂无 |
国际公布日暂无 |
国际申请日暂无 |
地址129, Samsung-ro Yeongtong-gu Suwon-si, Gyeonggi-do 16677 KR |
检索词暂无 |
An etching composition comprising : an oxidizing agent; an ammonium salt; an aqueous solvent; and an accelerator, wherein the ammonium salt includes an ammonium cation and an organic anion, and the accelerator includes a compound represented by Formula 1-1, a compound represented by Formula 1-2, a compound represented by Formula 1-3, a compound represented by Formula 1-4, a compound represented by Formula 1-5, a compound represented by Formula 1-6, or any combination thereof, wherein, in Formulae 1-1 to 1-6, Ar1 is a C3-C20 unsaturated cyclic group, X1 and X3 are each independently C or N, X2 in Formulae 1-1, 1-2 and 1-6 is C(R2), N(R2), N(H), *-N=*', *=N-*', O or S, X2 in Formula 1-3 is C(R2) or N(R2), X2 in Formulae 1-4 and 1-5 is N(H), *-N=*', *=N-*', O or S, X1 and X2 are linked to each other via a single bond or a double bond, X2 and X3 are linked to each other via a single bond or a double bond, Y1 is C(Z3)(Z4), N(Z3), C(=O) or C(=S), T1 is *-OH, *-SH, or *-NH2, T1a is O or S, R2 is *-O(Z5), *-S(Z5), or *-N(Z5)(Z6), Z1, Z3 to Z6, Z11, and Z12 are each independently, hydrogen, deuterium, *-F, *-Cl, *-Br, *-I, *-OH, *-SH, *-NH2, *-C(=O)H, *-C(=S)H, *-C(=O)-OH, *-C(=S)-OH, *-C(=O)-SH, *-C(=S)-SH, *-C(=O)-(NH2), *-C(=S)-(NH2), *-NH-C(=O)-(NH2), *-NH-C(=S)-(NH2), *-C(OH)-C(=O)-OH, *-C(SH)-C(=O)-OH, *-C(OH)-C(=S)-OH, *-C(OH)-C(=O)-SH, *-C(SH)-C(=S)-OH, *-C(SH)-C(=O)-SH, *-C(OH)-C(=S)-SH, *-C(SH)-C(=S)-SH, *-C(=O)-C(=O)-OH, *-C(=S)-C(=O)-OH, *-C(=O)-C(=S)-OH, *-C(=O)-C(=O)-SH, *-C(=S)-C(=S)-OH, *-C(=S)-C(=O)-SH, *-C(=O)-C(=S)-SH, *-C(=S)-C(=S)-SH, or *-C(=O)-ONH4; or a C1-C20 alkyl group, a C2-C20 alkenyl group, a C1-C20 alkoxy group, a C6-C20 aryl group, or a C2-C20 heteroaryl group, unsubstituted or substituted with deuterium, *-F, *-Cl, *-Br, *-I, *-OH, *-SH, *-NH2, *-C(=O)H, *-C(=S)H, *-C(=O)-OH, *-C(=S)-OH, *-C(=O)-SH, *-C(=S)-SH, *-C(=O)-(NH2), *-C(=S)-(NH2), *-NH-C(=O)-(NH2), *-NH-C(=S)-(NH2), *-C(OH)-C(=O)-OH, *-C(SH)-C(=O)-OH, *-C(OH)-C(=S)-OH, *-C(OH)-C(=O)-SH, *-C(SH)-C(=S)-OH, *-C(SH)-C(=O)-SH, *-C(OH)-C(=S)-SH, *-C(SH)-C(=S)-SH, *-C(=O)-C(=O)-OH, *-C(=S)-C(=O)-OH, *-C(=O)-C(=S)-OH, *-C(=O)-C(=O)-SH, *-C(=S)-C(=S)-OH, *-C(=S)-C(=O)-SH, *-C(=O)-C(=S)-SH, *-C(=S)-C(=S)-SH, *-C(=O)-ONH4, or any combination thereof, a1 is an integer from 0 to 5, A1 is, hydrogen or deuterium; or a C1-C20 alkyl group, a C2-C20 alkenyl group, a C1-C20 alkoxy group, a C6-C20 aryl group, or a C2-C20 heteroaryl group, unsubstituted or substituted with deuterium, *-F, *-Cl, *-Br, *-I, a C1-C20 alkyl group, a C1-C20 alkoxy group, or any combination thereof, and * and *' each indicate a binding site to a neighboring atom.